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Patent Application

Gerçek Zamanlı İnce Film Kalınlığının Ölçülmesini Sağlayan Bir Ölçüm Cihazı.

Invention Abstract

Bu buluş, quartz kristallerinin piezolektrik etkisine dayalı olarak çalışan QTF (Quartz Tuning Fork) sensörlerini (3) kullanarak gerçek zamanlı olarak ince film kalınlığının ölçülmesini sağlayan bir ölçüm cihazı (1) ile ilgilidir. TR 2022 018799 A2

IPC Classes
G01B 7/06
Parties
Applicant
Başkent Üniversitesi Bahçelievler Mh. Taşkent Cad. 77 3 Çankaya Ankara Türkiye
Inventor
İsmail Cengiz Koçum Mebrure Erdoğan Kübra Kırali Öner Dilek Çökeliler Serdaroğlu
Attorney
Dilek İmirlioğlu (Alpim Patent Marka Danışmanlık Ltd. Şti.)

This record is compiled from official TPMK patent bulletins and is provided for information. The abstract text is as published, in Turkish. The current legal status (opposition, assignment, invalidation) requires a full register review. Ask our experts for a comprehensive patent search.